MULTICOMPONENT OHMIC CONTACTS TO GaAs

Authors

  • Vadim Dmitriev Zaporizhia State Engineering Academy

Keywords:

gallium-arsenide, ternary alloy, vacuum deposition, heat treatment, specific resistance, ohmic contact

Abstract

The paper contains the results of the study of semiconductor wafer preprocessing, application and heat treatment modes of Ag-GE-In/n-n Ga As contacts impact on specific transient resistance.

Author Biography

Vadim Dmitriev, Zaporizhia State Engineering Academy

Head of Scientific Training Laboratory of the Department of Microelectronic Information Systems

References

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Published

2017-10-01

How to Cite

[1]
V. Dmitriev, “MULTICOMPONENT OHMIC CONTACTS TO GaAs”, Works of VNTU, no. 3, Oct. 2017.

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Section

Radioelectronics and Radioelectronic Equipment Design

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